Thickness-Dependent Electrical and Optoelectrical Properties of SnSe2 Field-Effect Transistors

被引:0
|
作者
Choi, Han-Woong [1 ]
Seo, Dong Hyun [1 ]
Heo, Ji Won [1 ]
Kim, Sang-Il [3 ]
Kim, TaeWan [1 ,2 ]
机构
[1] Department of AI Semiconductor, University of Seoul, Seoul,02504, Korea, Republic of
[2] School of Advanced Fusion Studies, University of Seoul, Seoul,02504, Korea, Republic of
[3] Department of Materials Science and Engineering, University of Seoul, Seoul,02504, Korea, Republic of
基金
新加坡国家研究基金会;
关键词
Carrier mobility - Ion sensitive field effect transistors - Layered semiconductors - Reactive ion etching - Semiconducting selenium compounds - Semiconducting tin compounds - Surface discharges;
D O I
10.1007/s13391-025-00544-0
中图分类号
学科分类号
摘要
Two-dimensional semiconductors such as SnSe2 hold great promise for electronic and optoelectronic applications. Factors such as the intrinsic carrier concentration and interfacial scattering strongly influence device performance. In this study, SnSe2-based field-effect transistors were fabricated with precise thickness control by reactive ion etching. Electrical measurements revealed that reducing the thickness from 300 to 21 nm led to an increase in carrier mobility from 3.76 to 26.6 cm² V− 1 s− 1 and an improvement in conductivity from 0.31 to 7.72 S/cm. This enhancement is attributed to a rise in carrier concentration, from 1.48 × 1018 to 1.66 × 1019 cm⁻³, along with better screening of interfacial Coulomb potential. Furthermore, the photoresponsivity varied with thickness, with thinner devices exhibiting a peak of 484 A/W under a 700-nm laser, compared to 260 A/W under a 900-nm laser for thicker devices. These findings highlight the critical role of thickness optimization in fine-tuning the electrical and optoelectronic properties of SnSe2-based devices. © The Author(s) under exclusive licence to The Korean Institute of Metals and Materials 2025.
引用
收藏
页码:154 / 161
页数:7
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