Experimental validation of a wave-height sensor based on a MEMS piezoresistive cantilever and a waterproof film

被引：0

作者：

Shimada, Kyota ^{[1
]}

Kishimoto, Takuto ^{[1
]}

Takahashi, Hidetoshi ^{[1
,2
]}

机构：

[1] Keio Univ, Sch Integrated Design Engn, Grad Sch Sci & Technol, 3-14-1 Hiyoshi,Kouhoku Ku, Yokohama, Kanagawa 2238522, Japan

[2] Keio Univ, Fac Sci & Technol, Dept Mech Engn, 3-14-1 Hiyoshi,Kouhoku Ku, Yokohama, Kanagawa 2238522, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2024年 / 63卷 / 12期

基金：

日本科学技术振兴机构;

关键词：

wave height sensor; piezoresistive cantilever; pressure sensor; SURFACE-WAVES; PRESSURE; SPOTTER; BUOY;

D O I：

10.35848/1347-4065/ad9fc4

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This paper presents a barometric pressure-sensing wave-height sensor that employs a microelectromechanical system piezoresistive cantilever, an air chamber, and a micromesh waterproof film. The developed sensor has a height resolution of less than 5 mm in the 0.01-10 Hz frequency band and a high time resolution with 100 Hz sampling rate. We conducted wave height measurements at sea using the developed sensor and compared its performance with that of a commercial global positioning system buoy-type wave-height sensor.

引用

页数：4

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