Experimental validation of a wave-height sensor based on a MEMS piezoresistive cantilever and a waterproof film

被引：0
|
作者：
Shimada, Kyota [1 ]
Kishimoto, Takuto [1 ]
Takahashi, Hidetoshi [1 ,2 ]
机构：
[1] Keio Univ, Sch Integrated Design Engn, Grad Sch Sci & Technol, 3-14-1 Hiyoshi,Kouhoku Ku, Yokohama, Kanagawa 2238522, Japan
[2] Keio Univ, Fac Sci & Technol, Dept Mech Engn, 3-14-1 Hiyoshi,Kouhoku Ku, Yokohama, Kanagawa 2238522, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2024年 / 63卷 / 12期
基金：
日本科学技术振兴机构;
关键词：
wave height sensor; piezoresistive cantilever; pressure sensor; SURFACE-WAVES; PRESSURE; SPOTTER; BUOY;
D O I：
10.35848/1347-4065/ad9fc4
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
This paper presents a barometric pressure-sensing wave-height sensor that employs a microelectromechanical system piezoresistive cantilever, an air chamber, and a micromesh waterproof film. The developed sensor has a height resolution of less than 5 mm in the 0.01-10 Hz frequency band and a high time resolution with 100 Hz sampling rate. We conducted wave height measurements at sea using the developed sensor and compared its performance with that of a commercial global positioning system buoy-type wave-height sensor.
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页数：4
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