Recent advances of focused ion beam technology

被引：0
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作者：
Gamo, K. [1 ]
机构：
[1] Osaka Univ, Osaka, Japan
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1997年 / 121卷 / 1-4期
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页码：464 / 469
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