Cross-sectional analysis on hardness and Sp3 bond fraction of diamond-like carbon film prepared by mass-separated ion beam deposition

被引：0
|
作者：
机构：
[1] Yamamoto, Kazuhiro
来源：
Yamamoto, K. | 1600年 / Japan Society of Applied Physics卷 / 43期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [41] Carbon transport in Si(001) and nucleation of diamond-like carbon layers during mass selected carbon ion beam deposition
    Christiansen, S
    Albrecht, M
    Frank, G
    Strunk, HP
    Ronning, C
    Hofsass, H
    Recknagel, E
    DIAMOND AND RELATED MATERIALS, 1998, 7 (01) : 15 - 22
  • [42] Structure and mechanical properties of W incorporated diamond-like carbon films prepared by a hybrid ion beam deposition technique
    Wang, Ai-Ying
    Lee, Kwang-Ryeol
    Ahn, Jae-Pyoung
    Han, Jun Hee
    CARBON, 2006, 44 (09) : 1826 - 1832
  • [43] Surface and in-depth distribution of sp2 and sp3 coordinated carbon atoms in diamond-like carbon films modified by argon ion beam bombardment during growth
    Zemek, J.
    Houdkova, J.
    Jiricek, P.
    Jelinek, M.
    CARBON, 2018, 134 : 71 - 79
  • [44] Structure and properties of diamond-like carbon films prepared by high-intensity pulsed-ion-beam ablation deposition
    Mei, Xian-Xiu
    Xu, Wei-Ping
    Ma, Teng-Cai
    Tan, Chang
    Dalian Ligong Daxue Xuebao/Journal of Dalian University of Technology, 2004, 44 (04): : 469 - 473
  • [45] Effects of annealing on material characteristics of diamond-like carbon film formed by focused-ion-beam chemical vapor deposition
    Kanda, Kazihiro
    Igaki, Jun-ya
    Saikubo, Akihiko
    Kometani, Reo
    Suzuki, Tsuneo
    Niihara, Koichi
    Saitoh, Hidetoshi
    Matsui, Shinji
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2008, 47 (09) : 7464 - 7466
  • [46] Correlation of sp3 and sp2 fraction of carbon with electrical, optical and nano-mechanical properties of argon-diluted diamond-like carbon films
    Dwivedi, Neeraj
    Kumar, Sushil
    Malik, H. K.
    Govind
    Rauthan, C. M. S.
    Panwar, O. S.
    APPLIED SURFACE SCIENCE, 2011, 257 (15) : 6804 - 6810
  • [47] Cross-sectional scanning force microscopy analysis of arc-discharge-deposited diamond-like carbon films
    Pischow, KA
    Koskinen, J
    Adamik, M
    Barna, PB
    CERAMICS INTERNATIONAL, 1996, 22 (01) : 49 - 52
  • [48] Effects of sp3 bond and modulation ratios on ultra-thin diamond-like carbon coatings using molecular dynamics nanoindentation
    Cheng-Da Wu
    Nan-Yo Yeh
    Applied Physics A, 2023, 129
  • [49] Effects of sp3 bond and modulation ratios on ultra-thin diamond-like carbon coatings using molecular dynamics nanoindentation
    Wu, Cheng-Da
    Yeh, Nan-Yo
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2023, 129 (12):
  • [50] TAILORING SP2/SP3 RATIO IN DIAMOND-LIKE CARBON FILMS VIA DEPOSITION PARAMETERS IN A HIGH VOLTAGE ANODIC VACUUM PLASMA
    Badulescu, M.
    Anghel, A.
    Surdu-Bob, C. C.
    Logofatu, C.
    Luculescu, C.
    ROMANIAN REPORTS IN PHYSICS, 2019, 71 (04)
12345