NEW POSITION ALIGNMENT METHOD IN ELECTRON-BEAM DIRECT WRITING LITHOGRAPHY USING THE SEM.

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作者：
Park, Sun-Woo [1 ]
Shono, Katsufusa [1 ]
Dumin, David J. [1 ]
机构：
[1] Sophia Univ, Tokyo, Jpn, Sophia Univ, Tokyo, Jpn
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 1987年 / 26卷 / 06期
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