DIRECT ELECTRON-BEAM LITHOGRAPHY

被引：0

作者：

ALLES, DS ^{[1
]}

机构：

[1] BELL TEL LABS INC,DEPT DEV LITHOG SYST,MURRAY HILL,NJ 07974

来源：

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：125 / 125

页数：1

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