Composition, structure and hardness of ZrCx films formed by activated reactive evaporation

被引：0

作者：

机构：

[1] Arai, Takashi

[2] Kobayashi, Toshiharu

[3] Itagaki, Takehiko

[4] Takei, Atsushi

[5] Ishida, Akira

[6] Doi, Haruo

来源：

Arai, Takashi | 1600年 / 54期

关键词：

Carbides;

D O I：

暂无

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学科分类号：

摘要：

引用

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