Composition, structure and hardness of ZrCx films formed by activated reactive evaporation

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[1] Arai, Takashi
[2] Kobayashi, Toshiharu
[3] Itagaki, Takehiko
[4] Takei, Atsushi
[5] Ishida, Akira
[6] Doi, Haruo
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Arai, Takashi | 1600年 / 54期
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Carbides;
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