Composition, structure and hardness of ZrCx films formed by activated reactive evaporation

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作者：

机构：

[1] Arai, Takashi

[2] Kobayashi, Toshiharu

[3] Itagaki, Takehiko

[4] Takei, Atsushi

[5] Ishida, Akira

[6] Doi, Haruo

来源：

Arai, Takashi | 1600年 / 54期

关键词：

Carbides;

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[1] COMPOSITION, STRUCTURE AND HARDNESS OF ZRCX FILMS FORMED BY ACTIVATED REACTIVE EVAPORATION
ARAI, T
KOBAYASHI, T
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ISHIDA, A
DOI, H
JOURNAL OF THE JAPAN INSTITUTE OF METALS, 1990, 54 (11) : 1250 - 1255
[2] Preparation of ZnO films by activated reactive evaporation
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[7] SUPERCONDUCTING FILMS GROWN INSITU BY THE ACTIVATED REACTIVE EVAPORATION PROCESS
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UMARJEE, DM
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[10] ACTIVATED REACTIVE EVAPORATION
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