Effect of nucleation density on heteroepitaxial diamond film growth on Si(100)

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作者：
Liao, Kejun [1 ]
Wang, Wanlu [1 ]
机构：
[1] Chongqing Univ, Chongqing, China
来源：
Weixi Jiagong Jishu/Microfabrication Technology | 1997年 / 04期
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页码：37 / 42
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