The effect of diamond film nucleation and growth in different substrate pretreatment methods

被引：0
|
作者：
Zhou, JA [1 ]
Wang, JH [1 ]
Yuan, RZ [1 ]
Mei, BC [1 ]
Li, QA [1 ]
机构：
[1] Wuhan Univ Technol, State Key Lab Adv Technol Mat Synth & Proc, Wuhan 430070, Peoples R China
来源：
JOURNAL OF WUHAN UNIVERSITY OF TECHNOLOGY-MATERIALS SCIENCE EDITION | 1999年 / 14卷 / 03期
关键词：
microwave plasma; diamond film; substrate pretreatment; nucleation;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The diamond film on single crystal silicon substrate in three kinds of substrate is deposited by pretreatment method using microwave plasma, the diamond film is analyzed using SEM and Raman, the reasons why substrate pretreatment affects nucleation and growth are probed. The results show that substrate pretreatment directly affects nucleation and growth of diamond film, homogeneous nucleation and growth can be formed only in suitable pretreatment method.
引用
收藏
页码：48 / 52
页数：5
相关论文
共 50 条
  • [1] Effect of diamond film nucleation and growth in different substrate pretreatment methods
    Zhou, Jian
    Wang, Jianhua
    Yuan, Runzhang
    Mei, Bingchu
    Li, Qiang
    [J]. Journal Wuhan University of Technology, Materials Science Edition, 1999, 14 (03): : 48 - 52
  • [2] THE EFFECT OF DIAMOND FILM NUCLEATION AND GROWTH IN DIFFERENT SUBSTRATE PRETREATMENT METHODS
    周健
    [J]. Journal of Wuhan University of Technology(Materials Science), 1999, (03) : 48 - 52
  • [3] Study on diamond thin film deposited on graphite substrate by different pretreatment methods
    Tsai, Hung-Yin
    Wu, Chih-Wei
    Lin, Yan-Ming
    Chang, Hao-Chun
    [J]. JOURNAL OF CERAMIC PROCESSING RESEARCH, 2012, 13 : S82 - S88
  • [4] NUCLEATION AND INITIAL GROWTH OF DIAMOND FILM ON SI SUBSTRATE
    JIANG, N
    SUN, BW
    ZHANG, Z
    LIN, Z
    [J]. JOURNAL OF MATERIALS RESEARCH, 1994, 9 (10) : 2695 - 2702
  • [5] Nucleation and growth of diamond film on porous silicon substrate
    Liao, Y
    Fang, RC
    Ye, F
    Shao, QY
    Wang, GZ
    [J]. MODERN PHYSICS LETTERS B, 1999, 13 (05): : 159 - 165
  • [6] NUCLEATION OF DIAMOND FILM GROWTH BY BUCKYTUBES
    LI, YB
    ZHU, YQ
    GAO, ZD
    LIANG, J
    WEI, BQ
    WU, DH
    HUI, MJ
    [J]. JOURNAL OF MATERIALS SCIENCE LETTERS, 1995, 14 (18) : 1281 - 1282
  • [7] Substrate pre-treatment by ultrasonication with diamond powder mixtures for nucleation enhancement in diamond film growth
    Buijnsters, J. G.
    Vazquez, L.
    ter Meulen, J. J.
    [J]. DIAMOND AND RELATED MATERIALS, 2009, 18 (10) : 1239 - 1246
  • [8] EFFECT OF SUBSTRATE PRETREATMENT ON DIAMOND DEPOSITION
    MAEDA, H
    IKARI, S
    MASUDA, S
    KUSAKABE, K
    MOROOKA, S
    [J]. DIAMOND AND RELATED MATERIALS, 1993, 2 (5-7) : 758 - 761
  • [9] Nucleation Enhancing Effect of Different ECR Plasmas Pretreatment in the RuO2 Film Growth by MOCVD
    Eom, Taejong
    Park, Yunkyu
    Lee, Chongmu
    [J]. JOURNAL OF THE KOREAN CERAMIC SOCIETY, 2005, 42 (02) : 94 - 98
  • [10] Effect of excimer laser pretreatment on diamond film deposited on hard alloy substrate
    Li, Chengming
    Wang, Jianming
    Xu, Zhong
    Lu, Fanxiu
    Wang, Jianjun
    [J]. Jinshu Xuebao/Acta Metallurgica Sinica, 1996, 32 (09):
12345