A wireless surface acoustic wave temperature sensor using langasite as substrate material for high-temperature applications

被引：0
|
作者：
Wang, Shou-Qi [1 ]
Harada, Jiro [1 ]
Uda, Satoshi [1 ]
机构：
[1] Electronics Device R and D Center, Mitsibushi Materials Corporation, 2270 Yokoze, Chichibu, Saitama 368-8503, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2003年 / 42卷 / 9 B期
关键词：
Curve fitting - Electrodes - High temperature applications - Impedance matching (electric) - Piezoelectric materials - Temperature measurement - Transducers;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A wireless surface acoustic wave (SAW) temperature sensor was produced using langasite single crystal as a piezoelectric substrate. The properties of both solid-electrode and split-electrode interdigital transducers (IDTs) were studied by fitting the admittance curves. A miniature antenna was used and the impedance matching technique between the antenna and the IDT was investigated. The temperature characteristic in the temperature range of 20-700°C was measured. The results showed that both the SAW chip and the antenna functioned in this temperature range.
引用
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页码：6124 / 6127
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