Control on the formation of Si nanodots fabricated by thermal annealing/oxidation of hydrogenated amorphous silicon

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[1] [1,Hazra, Sukti
[2] Sakata, Isao
[3] Yamanaka, Mitsuyuki
[4] Suzuki, Eiichi
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Hazra, S. (shazra@udel.edu) | 1600年 / American Institute of Physics Inc.卷 / 96期
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