Control on the formation of Si nanodots fabricated by thermal annealing/oxidation of hydrogenated amorphous silicon

被引：0
|
作者：
机构：
[1] [1,Hazra, Sukti
[2] Sakata, Isao
[3] Yamanaka, Mitsuyuki
[4] Suzuki, Eiichi
来源：
Hazra, S. (shazra@udel.edu) | 1600年 / American Institute of Physics Inc.卷 / 96期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
41
引用
收藏
相关论文
共 50 条
  • [21] The Synthesis and Structural Properties of Crystalline Silicon Quantum Dots upon Thermal Annealing of Hydrogenated Amorphous Si-Rich Silicon Carbide Films
    Guozhi Wen
    Xiangbin Zeng
    Xianghu Li
    Journal of Electronic Materials, 2016, 45 : 4432 - 4440
  • [22] The Synthesis and Structural Properties of Crystalline Silicon Quantum Dots upon Thermal Annealing of Hydrogenated Amorphous Si-Rich Silicon Carbide Films
    Wen, Guozhi
    Zeng, Xiangbin
    Li, Xianghu
    JOURNAL OF ELECTRONIC MATERIALS, 2016, 45 (08) : 4432 - 4440
  • [23] Thermal bias annealing experiments on aluminum/silicon nitride/hydrogenated amorphous silicon top gate structures
    Ecole Superieure d'Electricite, Gif sur Yvette, France
    J Non Cryst Solids, pt 1 (318-321):
  • [24] ANNEALING OF METASTABLE DEFECTS IN HYDROGENATED AMORPHOUS-SILICON
    STUTZMANN, M
    JACKSON, WB
    TSAI, CC
    PHYSICAL REVIEW B, 1986, 34 (01): : 63 - 72
  • [25] A study of the effects of annealing and outgassing on hydrogenated amorphous silicon
    Jennings, PJ
    Cornish, JCL
    Clare, BW
    Hefter, GT
    Santjojo, DJ
    THIN SOLID FILMS, 1997, 310 (1-2) : 156 - 160
  • [26] THE KINETICS OF FORMATION AND ANNEALING OF LIGHT-INDUCED DEFECTS IN HYDROGENATED AMORPHOUS-SILICON
    STUTZMANN, M
    JACKSON, WB
    TSAI, CC
    AIP CONFERENCE PROCEEDINGS, 1984, (120) : 213 - 220
  • [27] METAL CONTACTS ON AMORPHOUS HYDROGENATED SILICON - EFFECTS OF ANNEALING
    ZHANG, DH
    CHEN, B
    HANEMAN, D
    THIN SOLID FILMS, 1992, 208 (01) : 87 - 90
  • [28] Thermal bias annealing experiments on aluminum silicon nitride hydrogenated amorphous silicon top gate structures
    Dayoub, F
    Kleider, JP
    Longeaud, C
    Mencaraglia, D
    Reynaud, J
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1996, 200 : 318 - 321
  • [29] Amorphous chromium silicide formation in hydrogenated amorphous silicon
    A. Kovsarian
    J. M. Shannon
    Journal of Electronic Materials, 1998, 27 : 1268 - 1271
  • [30] Amorphous chromium silicide formation in hydrogenated amorphous silicon
    Kovsarian, A
    Shannon, JM
    JOURNAL OF ELECTRONIC MATERIALS, 1998, 27 (11) : 1268 - 1271
12345