Patterning characteristics of hole patterns in synchrotron radiation lithography

被引：0
|
作者：
Nakanishi, Kazuya [1 ]
Deguchi, Kimiyoshi [1 ]
Matsuda, Tadahito [1 ]
机构：
[1] NTT System Electronics Lab, Kanagawa, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1998年 / 37卷 / 4 A期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
11
引用
收藏
页码：2062 / 2065
相关论文
共 50 条
  • [41] APPLICATION OF SYNCHROTRON RADIATION TO X-RAY LITHOGRAPHY
    SPILLER, E
    EASTMAN, DE
    FEDER, R
    GROBMAN, WD
    GUDAT, W
    TOPALIAN, J
    JOURNAL OF APPLIED PHYSICS, 1976, 47 (12) : 5450 - 5459
  • [42] DRY DEVELOPED NEGATIVE RESIST IN SYNCHROTRON RADIATION LITHOGRAPHY
    TSUDA, M
    OIKAWA, S
    YABUTA, M
    YOKOTA, A
    NAKANE, H
    ATODA, N
    HOH, K
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01): : 256 - 260
  • [43] SYNCHROTRON RADIATION LITHOGRAPHY SYSTEM IN AN ATMOSPHERIC-ENVIRONMENT
    OKADA, K
    KOUNO, E
    NOMURA, E
    SUZUKI, K
    FUJII, K
    TANAKA, Y
    IWATA, J
    KAWASE, Y
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (07): : 1643 - 1648
  • [44] Evaluation of exposure dose repeatability in synchrotron radiation lithography
    Itoga, K
    Sumitani, H
    Watanabe, H
    Kumada, T
    Kodera, I
    Satoh, S
    Ogushi, N
    Oishi, S
    Edo, R
    Yamamoto, T
    Watanabe, Y
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (02): : 774 - 779
  • [45] HIGH-RESOLUTION LITHOGRAPHY USING SYNCHROTRON RADIATION
    BETZ, H
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1986, 246 (1-3): : 658 - 667
  • [46] SYNCHROTRON RADIATION X-RAY LITHOGRAPHY.
    Haelbich, R.P.
    Silverman, J.P.
    Warlaumont, J.M.
    Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1983, 222 (1-2) : 291 - 301
  • [47] HIGH RESOLUTION LITHOGRAPHY USING SYNCHROTRON RADIATION.
    Betz, H.
    Nuclear instruments and methods in physics research, 1985, A246 (1-3): : 658 - 667
  • [48] DEVELOPMENT OF HIGHLY RELIABLE SYNCHROTRON RADIATION LITHOGRAPHY BEAMLINE
    OKADA, K
    FUJII, K
    KAWASE, Y
    NAGANO, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (01): : 191 - 194
  • [49] SYNCHROTRON RADIATION BEAMLINE FOR X-RAY-LITHOGRAPHY
    GOTO, S
    TAGUCHI, T
    OSADA, T
    OKAMURA, S
    HISATSUGU, T
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (02): : 286 - 295
  • [50] PROGRESS IN DEEP-ETCH SYNCHROTRON RADIATION LITHOGRAPHY
    EHRFELD, W
    BLEY, P
    GOTZ, F
    MOHR, J
    MUNCHMEYER, D
    SCHELB, W
    BAVING, HJ
    BEETS, D
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (01): : 178 - 182
12345