Etching of amorphous Al2O3 produced by ion implantation

被引：0
|
作者：
McHargue, Carl J. [1 ]
Hunn, John D. [1 ]
Joslin, Debra L. [1 ]
Alves, E. [1 ]
da Silva, M.F. [1 ]
Soares, J.C. [1 ]
机构：
[1] Univ of Tennessee, Knoxville, United States
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1997年 / 127-128卷
关键词：
Number:; DE-ACOS-96OR22464a; Acronym:; USDOE; Sponsor: U.S. Department of Energy; -; Sponsor: Lockheed Martin;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：596 / 598
相关论文
共 50 条
  • [41] FORMATION OF SUBSURFACE AL2O3 LAYERS IN ALUMINUM BY OXYGEN ION-IMPLANTATION
    MUSKET, RG
    BROWN, DW
    HAYDEN, HC
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR): : 31 - 37
  • [42] ION-IMPLANTATION EFFECTS IN AL2O3 - HYDRATION AND OPTICAL-ABSORPTION
    ARNOLD, GW
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 : 1036 - 1039
  • [43] Improved mechanical properties of Al2O3/PTFE layer by metal ion implantation
    Shao, Xuan
    De Zhang, Yong
    Tang, Hui
    International Journal of Control and Automation, 2015, 8 (12): : 89 - 96
  • [44] FORMATION OF SUBSURFACE Al2O3 LAYERS IN ALUMINUM BY OXYGEN ION IMPLANTATION.
    Musket, R.G.
    Brown, D.W.
    Hayden, H.C.
    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1985, B7-8 (pt 1) : 31 - 37
  • [45] STRUCTURAL INVESTIGATION OF AL2O3 FORMED BY ION-IMPLANTATION AT VARIOUS DOSES
    PAWAR, PS
    KOTHARI, DC
    NARSALE, AM
    RAOLE, PM
    GOGAWALE, SV
    GUZMAN, L
    GIRARDI, S
    DAPOR, M
    ANDERLE, M
    CANTERI, R
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 39 (1-4): : 670 - 674
  • [46] Colloidal au and ag precipitates formed in Al2O3 by ion implantation and annealing
    White, C.W.
    Thomas, D.K.
    Hensley, D.K.
    Zuhr, R.A.
    McCallum, J.C.
    Pogany, A.
    Haglund, R.F.
    Magruder, R.H.
    Yang, L.
    Nanostructured Materials, 1993, 3 (1-6):
  • [47] Synthesis of Cu nanoparticles in Al2O3 by ion implantation and subsequent laser annealing
    Stepanov, A
    Popok, V
    APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY, 2003, 680 : 601 - 604
  • [48] Formation of Ag/Pt bimetallic nanoparticles obtained by ion implantation in ?- Al2O3
    Cordero-Santiago, Juan-Pablo
    Crespo-Sosa, Alejandro
    PHOTONICS AND NANOSTRUCTURES-FUNDAMENTALS AND APPLICATIONS, 2022, 51
  • [49] Enhancing surface properties of (Fe,Cr)Al - Al2O3 nanocomposite by oxygen ion implantation
    Sourani, F.
    Enayati, M. H.
    Ashrafizadeh, F.
    Sayyedan, F. S.
    Chu, P. K.
    JOURNAL OF ALLOYS AND COMPOUNDS, 2021, 853
  • [50] Optical studies of amorphous Ge nanostructures in Al2O3 produced by pulsed laser deposition
    Martin-Sanchez, J.
    Toudert, J.
    Serna, R.
    de Andres, A.
    Garcia-Lopez, J.
    THIN SOLID FILMS, 2013, 541 : 92 - 96
12345