STRUCTURAL INVESTIGATION OF AL2O3 FORMED BY ION-IMPLANTATION AT VARIOUS DOSES

被引：4

作者：

PAWAR, PS ^{[1
]}

KOTHARI, DC ^{[1
]}

NARSALE, AM ^{[1
]}

RAOLE, PM ^{[1
]}

GOGAWALE, SV ^{[1
]}

GUZMAN, L ^{[1
]}

GIRARDI, S ^{[1
]}

DAPOR, M ^{[1
]}

ANDERLE, M ^{[1
]}

CANTERI, R ^{[1
]}

机构：

[1] IST RIC SCI & TECHNOL,I-38050 POVO,ITALY

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 39卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(89)90871-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：670 / 674

页数：5

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