STRUCTURAL INVESTIGATION OF AL2O3 FORMED BY ION-IMPLANTATION AT VARIOUS DOSES

被引：4
|
作者：
PAWAR, PS [1 ]
KOTHARI, DC [1 ]
NARSALE, AM [1 ]
RAOLE, PM [1 ]
GOGAWALE, SV [1 ]
GUZMAN, L [1 ]
GIRARDI, S [1 ]
DAPOR, M [1 ]
ANDERLE, M [1 ]
CANTERI, R [1 ]
机构：
[1] IST RIC SCI & TECHNOL,I-38050 POVO,ITALY
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 39卷 / 1-4期
关键词：
D O I：
10.1016/0168-583X(89)90871-9
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：670 / 674
页数：5
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