Preparation of (Ba, Sr)TiO3 thin films by chemical vapor deposition using liquid sources

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[1] Kawahara, Takaaki
[2] Yamamuka, Mikio
[3] Makita, Tetsuro
[4] Tsutahara, Koichiro
[5] Yuuki, Akimasa
[6] Ono, Kouichi
[7] Matsui, Yasuji
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Kawahara, Takaaki | 1600年 / JJAP, Minato-ku, Japan卷 / 33期
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Thin films;
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