Preparation of (Ba, Sr)TiO3 thin films by chemical vapor deposition using liquid sources

被引：0
|
作者：
机构：
[1] Kawahara, Takaaki
[2] Yamamuka, Mikio
[3] Makita, Tetsuro
[4] Tsutahara, Koichiro
[5] Yuuki, Akimasa
[6] Ono, Kouichi
[7] Matsui, Yasuji
来源：
Kawahara, Takaaki | 1600年 / JJAP, Minato-ku, Japan卷 / 33期
关键词：
Thin films;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] Deposition characteristics of (Ba, Sr)TiO3 thin films by liquid source metal-organic chemical vapor deposition at low substrate temperatures
    Kang, CS
    Cho, HJ
    Hwang, CS
    Lee, BT
    Lee, KH
    Horii, H
    Kim, WD
    Lee, SI
    Lee, MY
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1997, 36 (11): : 6946 - 6952
  • [22] Preparation and dielectric properties of the multilayer capacitor with (Ba, Sr)TiO3 thin layers by metalorganic chemical vapor deposition
    Takeshima, Y
    Shiratsuyu, K
    Takagi, H
    Sakabe, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (9B): : 5870 - 5873
  • [23] Improvement of dielectric properties of (Ba,Sr)TiO3 thin films deposited by pulse injection chemical vapor deposition
    Cho, HJ
    Kim, HJ
    APPLIED PHYSICS LETTERS, 1998, 72 (07) : 786 - 788
  • [24] Chemical reaction kinetics and growth rate of (Ba, Sr) TiO3 films prepared by liquid source chemical vapor deposition
    Fujimoto, T
    Itoh, Y
    Okuyama, K
    Yamada, S
    Murakami, T
    Shi, FG
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2000, 147 (07) : 2581 - 2588
  • [25] Preparation and dielectric properties of the multilayer capacitor with (Ba, Sr)TiO3 thin layers by metalorganic chemical vapor deposition
    Murata Manufacturing Co, Ltd, Shiga, Japan
    Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap, 9 B (5870-5873):
  • [26] Reaction mechanism and electrical properties of (Ba, Sr)TiO3 films prepared by liquid source chemical vapor deposition
    Yamamuka, Mikio
    Kawahara, Takaaki
    Yuuki, Akimasa
    Ono, Kouichi
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1996, 35 (4 B): : 2530 - 2535
  • [27] Reaction mechanism and electrical properties of (Ba, Sr)TiO3 films prepared by liquid source chemical vapor deposition
    Yamamuka, M
    Kawahara, T
    Yuuki, A
    Ono, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (4B): : 2530 - 2535
  • [28] Step coverage and electrical properties of (Ba,Sr)TiO3 films prepared by liquid source chemical vapor deposition
    Kawahara, T
    Yamamuka, M
    Tarutani, M
    Horikawa, T
    Ono, K
    DIELECTRIC MATERIAL INTEGRATION FOR MICROELECTRONICS, 1998, 98 (03): : 190 - 195
  • [29] Effects of post-annealing on dielectric properties of (Ba, Sr)TiO3 thin films prepared by liquid source chemical vapor deposition
    Horikawa, T
    Tanimura, J
    Kawahara, T
    Yamamuka, M
    Tarutani, M
    Ono, K
    IEICE TRANSACTIONS ON ELECTRONICS, 1998, E81C (04) : 497 - 504
  • [30] (Ba,Sr)TiO3 thin films:: Preparation, properties and reliability
    Tseng, TY
    FERROELECTRICS, 1999, 232 (1-4) : 881 - 893
12345