NEW ANALYTICAL MODEL FOR SPIN COATING PROCESS WITH SOLVENT EVAPORATION.

被引：0

作者：

Shimoji, Sadao ^{[1
]}

机构：

[1] Tokyo Engineering Univ, Tokyo, Jpn, Tokyo Engineering Univ, Tokyo, Jpn

来源：

Japanese Journal of Applied Physics, Part 2: Letters | 1987年 / 26卷 / 06期

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[1] A NEW ANALYTICAL MODEL FOR SPIN COATING PROCESS WITH SOLVENT EVAPORATION
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