Microwave ion source using resonant cavity

被引：0

作者：

Tahara, Hirokazu ^{[1
]}

Yasui, Toshiaki ^{[1
]}

Onoe, Ken-ichi ^{[1
]}

Tsubakishita, Yasuji ^{[1
]}

Yoshikawa, Takao ^{[1
]}

机构：

[1] Osaka Univ, Osaka, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1993年 / 32卷 / 3 A期

关键词：

Cylindrical resonant cavity - Electron cyclotron resonance discharge - Ion beam extraction - Microwave ion sources - Off resonance discharge - Reentrant coaxial resonant cavity - Weak ring cusped magnetic fields;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：1298 / 1302

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