Microwave ion source using resonant cavity

被引：0
|
作者：
Tahara, Hirokazu [1 ]
Yasui, Toshiaki [1 ]
Onoe, Ken-ichi [1 ]
Tsubakishita, Yasuji [1 ]
Yoshikawa, Takao [1 ]
机构：
[1] Osaka Univ, Osaka, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1993年 / 32卷 / 3 A期
关键词：
Cylindrical resonant cavity - Electron cyclotron resonance discharge - Ion beam extraction - Microwave ion sources - Off resonance discharge - Reentrant coaxial resonant cavity - Weak ring cusped magnetic fields;
D O I：
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中图分类号：
学科分类号：
摘要：
引用
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页码：1298 / 1302
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