共 50 条
- [22] Electrical properties of nanoscale TiSi2 islands on Si SELF-ORGANIZED PROCESSES IN SEMICONDUCTOR ALLOYS, 2000, 583 : 111 - 116
- [27] FORMATION OF SELF-ALIGNED TISI2 BY RAPID THERMAL-PROCESSING FOR VLSI CIRCUITS HELVETICA PHYSICA ACTA, 1986, 59 (6-7): : 1026 - 1026
- [29] STRUCTURE AND PROPERTIES OF TISI2 THIN-FILMS AND TISI2-SI(111) INTERFACES SURFACE & COATINGS TECHNOLOGY, 1991, 45 (1-3): : 281 - 291
- [30] Agglomeration resistant self-aligned silicide process using N2 implantation into TiSi2 Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1997, 36 (6 A): : 3639 - 3643