Effect of electromagnetic waves propagating in the periphery of electron cyclotron resonance plasma on the uniformity

被引：0
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作者：
Ueda, Yoko [1 ]
Muta, Hiroshi [2 ]
Kawai, Yoshinobu [1 ]
机构：
[1] Interdisc. Grad. Sch. of Eng. Sci., Kyushu University, Kasuga-koen 6-1, Kasuga, Fukuoka 816-8580, Japan
[2] Dept. of Electronics and Contr. Eng., Kitakyushu Natl. Coll. of Technology, Kitakyushu 813, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 7 B期
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页码：4333 / 4337
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