Effect of electromagnetic waves propagating in the periphery of electron cyclotron resonance plasma on the uniformity

被引：0

作者：

Ueda, Yoko ^{[1
]}

Muta, Hiroshi ^{[2
]}

Kawai, Yoshinobu ^{[1
]}

机构：

[1] Interdisc. Grad. Sch. of Eng. Sci., Kyushu University, Kasuga-koen 6-1, Kasuga, Fukuoka 816-8580, Japan

[2] Dept. of Electronics and Contr. Eng., Kitakyushu Natl. Coll. of Technology, Kitakyushu 813, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 7 B期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：4333 / 4337

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