Material properties of ZrN film on silicon prepared by low-energy ion-assisted deposition

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[1] Horita, Susumu
[2] Kobayashi, Mituru
[3] Akahori, Hiroshi
[4] Hata, Tomonobu
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Horita, Susumu | 1600年 / Elsevier Sequoia SA, Lausanne, Switzerland卷 / 66期
关键词：
Crystalline quality - Low energy ion assisted deposition - Material properties;
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