Scatterometry measurement of sub-0.1 μm linewidth gratings

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Coulombe, Stephen A.
Minhas, Babar K.
Raymond, Christopher J.
Naqvi, S. Sohail H.
McNeil, John R.
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Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 1998年 / 16卷 / 01期
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