共 50 条
- [22] Nanoscale elastic Imaging of micro-electro-mechanical system based micro-mirrors RELIABILITY, TESTING AND CHARACTERIZATION OF MEMS/MOEMS, 2001, 4558 : 143 - 150
- [24] MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) MICRO-HEATER INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION - 2012, VOL 9, PTS A AND B, 2013, : 881 - 886
- [25] Hybrid Prognostic Approach for Micro-Electro-Mechanical Systems 2015 IEEE AEROSPACE CONFERENCE, 2015,
- [27] Thermodynamic reversible transformations in micro-electro-mechanical systems The European Physical Journal B, 2018, 91
- [29] Special micro-electro-mechanical systems pressure sensor Jixie Gongcheng Xuebao/Journal of Mechanical Engineering, 2013, 49 (06): : 187 - 197
- [30] Presentation highlights: Micro-Electro-Mechanical Systems (MEMS) JOURNAL OF REHABILITATION RESEARCH AND DEVELOPMENT, 2002, 39 (03): : 3 - 4