Special issue on electroceramics in micro-electro-mechanical systems

被引：0
|
作者：
Setter, N
机构：
来源：
JOURNAL OF ELECTROCERAMICS | 2004年 / 12卷 / 1-2期
关键词：
D O I：
10.1023/B:JECR.0000034010.06307.75
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：5 / 6
页数：2
相关论文
共 50 条
  • [1] Special micro-electro-mechanical systems pressure sensor
    Jiang, Zhuangde
    Tian, Bian
    Zhao, Yulong
    Zhao, Libo
    [J]. Jixie Gongcheng Xuebao/Journal of Mechanical Engineering, 2013, 49 (06): : 187 - 197
  • [2] Special surface for power delivery to wireless micro-electro-mechanical systems
    Martel, S
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2005, 15 (10) : S251 - S258
  • [3] Dynamic analysis of micro-electro-mechanical systems
    Shi, F
    Ramesh, P
    Mukherjee, S
    [J]. INTERNATIONAL JOURNAL FOR NUMERICAL METHODS IN ENGINEERING, 1996, 39 (24) : 4119 - 4139
  • [4] Micro-Electro-Mechanical Systems in Light Stabilization
    Gilewski, Marian
    [J]. SENSORS, 2023, 23 (06)
  • [5] Design Automation for Micro-Electro-Mechanical Systems
    Kriebel, David
    Schmidt, Henry
    Schiebold, Michael
    Freitag, Markus
    Arnold, Benjamin
    Naumann, Michael
    Mehner, Jan. E.
    [J]. CAS 2018 PROCEEDINGS: 2018 INTERNATIONAL SEMICONDUCTOR CONFERENCE, 2018, : 43 - 50
  • [6] Residual stresses in micro-electro-mechanical systems
    Qian, Jin
    Liu, Cheng
    Zhang, Dacheng
    Zhao, Yapu
    [J]. Journal of Mechanical Strength, 2001, 23 (04) : 393 - 401
  • [7] SPECIAL ISSUE ON MICROMACHINES AND MICRO ELECTRO MECHANICAL SYSTEMS - FOREWORD
    FUJITA, H
    [J]. IEICE TRANSACTIONS ON ELECTRONICS, 1995, E78C (02) : 121 - 122
  • [8] Mechanical properties and scaling effects in micro-electro-mechanical systems
    Mei, Tao
    Kong, Deyi
    Zhang, Peiqiang
    Wu, Xiaoping
    [J]. 2001, Journal of Mechanical Strength (23)
  • [9] MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) MICRO-HEATER
    Janakos, C. N.
    Goericke, F. T.
    Pisano, A. P.
    [J]. INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION - 2012, VOL 9, PTS A AND B, 2013, : 881 - 886
  • [10] Hybrid Prognostic Approach for Micro-Electro-Mechanical Systems
    Skima, Haithem
    Medjaher, Kamal
    Varnier, Christophe
    Dedu, Eugen
    Bourgeois, Julien
    [J]. 2015 IEEE AEROSPACE CONFERENCE, 2015,
12345