METAL SILICIDES WITH ENERGETIC PULSES.

被引：0

作者：

D'Anna, E. ^{[1
]}

Leggieri, G. ^{[1
]}

Luches, A. ^{[1
]}

Majni, G. ^{[1
]}

Nava, F. ^{[1
]}

Ottaviani, G. ^{[1
]}

机构：

[1] Univ of Lecce, Lecce, Italy, Univ of Lecce, Lecce, Italy

来源：

Applied Physics A: Solids and Surfaces | 1986年 / A40卷 / 03期

关键词：

CHEMICAL REACTIONS - Reaction Kinetics - ELECTRON BEAMS - Applications - HEAT TREATMENT - Annealing - INTERMETALLICS - LASER BEAMS - Applications;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Samples formed of a thin metal film deposited on silicon single crystal were annealed with electron and laser (ruby and excimer) pulses over a wide range of fluences. From a comparison of the experimental results with the temperature profiles of the irradiated samples, it turns out that silicide formation starts when the metal/silicon interface reaches the lowest eutectic temperature of the binary metal/silicon system. The growth rate of reacted layers is of the order of 1 m/s.

引用

页码：183 / 190

共 50 条

[41] GAMMA-SPECTROGRAPH FOR SINGLE RADIATION PULSES.
Spekhov, Yu.A.
Volkovitskii, V.P.
Golubev, V.I.
Subbotin, A.N.
Instruments and Experimental Techniques (English Translation of Pribory I Tekhnika Eksperimenta), 1976, 19 (5 pt 1): : 1313 - 1316
[42] Laser alignment of molecules with short laser pulses.
Stapelfeldt, H
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2004, 227 : U256 - U256
[43] GENERATION KINETICS OF LASERS PUMPED BY SHORT PULSES.
Grigor'yants, V.V.
Makovetskiy, A.A.
Tishchenko, R.P.
1600, (28):
[44] Making ultracold molecules with chirped laser pulses.
Luc-Koenig, E
Masnou-Seeuws, F
Vatasescu, M
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2004, 228 : U232 - U232
[45] PROGRAMMING GENERATOR PRODUCING POWERFUL NANOSECOND PULSES.
Krylov, V.P.
Meshkov, A.N.
Smirnov, V.N.
Shishko, V.I.
Instruments and Experimental Techniques (English Translation of Pribory I Tekhnika Eksperimenta), 1975, 18 (6 pt 1): : 1788 - 1789
[46] EXTREMELY FAST LOGAMP HANDLES NARROW PULSES.
Potson, David
Hughes, Richard Smith
1600, (24):
[47] OBSERVATION OF NQR WITH THE AID OF SEQUENCES OF COHERENT PULSES.
Mozzhukhin, G.V.
Anferov, V.P.
Grechishkin, V.S.
Sinyavskii, I.Ya.
1600, (29):
[48] Synopsis of Galeno and his own work on pulses.
Hernandez, Justo
DYNAMIS, 2006, 26 : 323 - 325
[49] Experimental influencing of the highs and forms of the carotis and cruralis pulses.
Hurthle, K
PFLUGERS ARCHIV FUR DIE GESAMTE PHYSIOLOGIE DES MENSCHEN UND DER TIERE, 1934, 233 : 262 - 310
[50] QUASIOPTIMUM FILTERING IN A PHOTODIODE RECEIVER FOR SHORT SIGNAL PULSES.
Mikheev, Yu.S.
Petrov, A.S.
1978, 45 (02): : 77 - 80

← 1 2 3 4 5 →