Reduced-pressure chemical vapor synthesis of nanocrystalline silicon carbide powders

被引：0
|
作者：
Thin Films Division, Materials Science Department, Darmstadt University of Technology, Petersenstrasse 23, D-64287 Darmstadt, Germany [1 ]
机构：
来源：
Chem Vapor Deposition | / 4卷 / 143-149期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [41] Synthesis of silicon carbide nanowires by solid phase source chemical vapor deposition
    Ni J.
    Li Z.
    Zhang Z.
    Frontiers of Materials Science in China, 2007, 1 (3): : 304 - 308
  • [42] Synthesis of one-dimensional nanostructured silicon carbide by chemical vapor deposition
    Pampuch, R
    Górny, G
    Stobierski, L
    GLASS PHYSICS AND CHEMISTRY, 2005, 31 (03) : 370 - 376
  • [43] Synthesis of One-Dimensional Nanostructured Silicon Carbide by Chemical Vapor Deposition
    R. Pampuch
    G. Gorny
    L. Stobierski
    Glass Physics and Chemistry, 2005, 31 : 370 - 376
  • [44] PHASE AND CHEMICAL COMPOSITION OF SILICON CARBIDE POWDERS.
    Kazakov, V.K.
    1600, (05):
  • [45] Homogeneous nanocrystalline cubic silicon carbide films prepared by inductively coupled plasma chemical vapor deposition
    Cheng, Qijin
    Xu, S.
    Long, Jidong
    Huang, Shiyong
    Guo, Jun
    NANOTECHNOLOGY, 2007, 18 (46)
  • [46] Laser synthesis of ultrafine powders of silicon nitride and silicon carbide
    Antsiferov, VN
    Khalturin, VG
    Ainagos, AF
    POWDER METALLURGY AND METAL CERAMICS, 1998, 37 (1-2) : 33 - 36
  • [47] Reduced-pressure chemical vapor deposition of epitaxial ge films on si(001) substrates using GeCl4
    Park, Ji-Soo
    Curtin, Michael
    Major, Cheryl
    Bengtson, Susan
    Carroll, Mark
    Lochtefeld, Anthony
    ELECTROCHEMICAL AND SOLID STATE LETTERS, 2007, 10 (11) : H313 - H316
  • [48] Helicon wave plasma chemical vapor deposition of nanocrystalline silicon carbide films at low substrate temperature
    Yu, W
    Lu, WB
    Wang, BZ
    Li, H
    Fu, GS
    Nanophotonics, Nanostructure, and Nanometrology, 2005, 5635 : 410 - 413
  • [49] Microwave Synthesis of Silicon Carbide Nano Powders with Silicon and Carbon
    Lu, Youjun
    Shen, Hongfang
    Guo, Shengwei
    HIGH-PERFORMANCE CERAMICS VIII, 2014, 602-603 : 118 - 121
  • [50] Laser synthesis of ultrafine powders of silicon nitride and silicon carbide
    V. N. Antsiferov
    V. G. Khalturin
    A. F. Ainagos
    Powder Metallurgy and Metal Ceramics, 1998, 37 : 33 - 36
12345