Reduced-pressure chemical vapor synthesis of nanocrystalline silicon carbide powders

被引：0
|
作者：
Thin Films Division, Materials Science Department, Darmstadt University of Technology, Petersenstrasse 23, D-64287 Darmstadt, Germany [1 ]
机构：
来源：
Chem Vapor Deposition | / 4卷 / 143-149期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [31] Defect Characterization in Ge/(001)Si Epitaxial Films Grown by Reduced-Pressure Chemical Vapor Deposition
    Bharathan, Jayesh
    Narayan, Jagdish
    Rozgonyi, George
    Bulman, Gary E.
    JOURNAL OF ELECTRONIC MATERIALS, 2013, 42 (10) : 2888 - 2896
  • [32] Production of highly dispersed metal powders by electrical explosion in reduced-pressure nitrogen
    V. S. Sedoi
    V. V. Valevich
    Technical Physics Letters, 1999, 25 : 584 - 585
  • [33] Production of highly dispersed metal powders by electrical explosion in reduced-pressure nitrogen
    Sedoi, VS
    Valevich, VV
    TECHNICAL PHYSICS LETTERS, 1999, 25 (07) : 584 - 585
  • [34] Low pressure chemical vapor deposition of silicon carbide from dichlorosilane and acetylene
    Wang, CF
    Tsai, DS
    MATERIALS CHEMISTRY AND PHYSICS, 2000, 63 (03) : 196 - 201
  • [35] Reduced Pressure Curing on Polycarbosilane Precursor for Synthesis of Silicon Carbide Fiber
    Joo, Young Jun
    Khishigbayar, Khos-Erdene
    Cho, Kwang Youn
    Kim, Cheol Jin
    FIBERS AND POLYMERS, 2018, 19 (09) : 1806 - 1812
  • [36] Reduced Pressure Curing on Polycarbosilane Precursor for Synthesis of Silicon Carbide Fiber
    Young Jun Joo
    Khos-Erdene Khishigbayar
    Kwang Youn Cho
    Cheol Jin Kim
    Fibers and Polymers, 2018, 19 : 1806 - 1812
  • [37] Synthesis of aluminum nitride powders by low pressure chemical vapor deposition
    Hing, P
    Lee, WE
    Tan, HW
    PROCESSING AND FABRICATION OF ADVANCED MATERIALS VI, VOLS 1 & 2, 1998, : 861 - 870
  • [38] Silicon carbide whisker reinforced silicon carbide composites by chemical vapor infiltration
    Hua, Yunfeng
    Zhang, Litong
    Cheng, Laifei
    Wang, Jing
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2006, 428 (1-2): : 346 - 350
  • [39] Reduced-Pressure Chemical Vapor Deposition Growth of Isolated Ge Crystals and Suspended Layers on Micrometric Si Pillars
    Skibitzki, Oliver
    Capellini, Giovanni
    Yamamoto, Yuji
    Zaumseil, Peter
    Schubert, Markus Andreas
    Schroeder, Thomas
    Ballabio, Andrea
    Bergamaschini, Roberto
    Salvalaglio, Marco
    Miglio, Leo
    Montalenti, Francesco
    ACS APPLIED MATERIALS & INTERFACES, 2016, 8 (39) : 26374 - 26380
  • [40] Low Temperature Synthesis of Nanocrystalline Silicon and Silicon Oxide Films by Plasma Chemical Vapor Deposition
    Tomyo, Atsushi
    Kaki, Hirokazu
    Takahashi, Eiji
    Hayashi, Tsukasa
    Ogata, Kiyoshi
    Uraoka, Yukiharu
    AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY-2008, 2008, 1066 : 167 - +
12345