Fabrication and finite element analysis of piezoelectric thick-film micro-actuator for hard disk drives

被引：0
|
作者：
Jing, Yang [1 ]
Luo, Jian-Bin [1 ]
Zhang, Xue-Heng [1 ]
Zhang, Li [1 ]
机构：
[1] Lab. of Tribology, Tsinghua Univ., Beijing 100084, China
来源：
Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology | 2004年 / 24卷 / 12期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
16
引用
收藏
页码：1045 / 1048
相关论文
共 50 条
  • [1] Fabrication of piezoelectric ceramic micro-actuator and its reliability for hard disk drives
    Jing, Y
    Luo, JB
    Yang, WY
    Ju, GX
    [J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2004, 51 (11) : 1470 - 1476
  • [2] Fabrication and analysis of PMN-PZT multilayer thick-film micro-actuator
    Jing, Yang
    Luo, Jianbin
    Lu, Xinchun
    Zhang, Li
    [J]. Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering, 2005, 41 (03): : 107 - 111
  • [3] Design and evaluation of PZT thin-film micro-actuator for hard disk drives
    Jing, Y
    Luo, JB
    Yi, XX
    Gu, X
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2004, 116 (02) : 329 - 335
  • [4] Control of a micro-actuator for hard disk drives using self-sensing actuator
    Graduate School of Engineering, Gifu University, 1-1 Yanagido, Gifu, Gifu, 501-1193, Japan
    不详
    不详
    [J]. Int J Appl Electromagnet Mech, 2006, 3-4 (247-259):
  • [5] Control of a micro-actuator for hard disk drives using self-sensing actuator
    Yamada, Hiroyuki
    Sasaki, Minoru
    Nam, Yoonsu
    [J]. INTERNATIONAL JOURNAL OF APPLIED ELECTROMAGNETICS AND MECHANICS, 2006, 24 (3-4) : 247 - 259
  • [6] Finite element analysis of PZT thick-film piezoelectric cantilever beams
    Fang, Huabin
    Xu, Zhengyi
    Liu, Jingquan
    Chen, Di
    Cai, Bingchu
    [J]. Zhongguo Jixie Gongcheng/China Mechanical Engineering, 2005, 16 (SUPPL.): : 257 - 260
  • [7] Control of a micro-actuator for hard disk drives using self-sensing
    Yamada, H
    Sasaki, M
    Nam, Y
    [J]. 8TH IEEE INTERNATIONAL WORKSHOP ON ADVANCED MOTION CONTROL, PROCEEDINGS, 2004, : 147 - 152
  • [8] Active vibration control of a micro-actuator for hard disk drives using self-sensing actuator
    Yamada, Hiroyuki
    Sasaki, Minoru
    Nam, Yoonsu
    [J]. JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES, 2008, 19 (01) : 113 - 123
  • [9] Design and fabrication of a novel piezoelectric multilayer actuator by thick-film screen printing technology
    Zhu, W
    Yao, K
    Zhang, Z
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2000, 86 (03) : 149 - 153
  • [10] Improved design of polymeric composite electrothermal micro-actuator for high track density hard disk drives
    J. P. Yang
    G. K. Lau
    C. P. Tan
    N. B. Chong
    B. Thubthimthong
    L. Gonzaga
    Z. M. He
    [J]. Microsystem Technologies, 2013, 19 : 1697 - 1704
12345