Fabrication and analysis of PMN-PZT multilayer thick-film micro-actuator

A new U-type piezoelectric micro-actuator with two lead magnesium niobate-lead zirconate titanate Piezoelectric (PMN-PZT) multilayer elements bonded to a stainless steel (SUS304) substrate for positioning a magnetic head for high-density hard disk devices has been fabricated and analyzed. This PMN-PZT micro-actuator is made using a tape-casting technique to deposit PMN-PZT thick-films and applying screen-printing processes to fabricate Ag/Pd electrodes. After that, an U-type micro-actuator attached to each side via piezoelectric elements is also practically measured by laser Doppler vibrometer in order to testify the driving mechanics of it. The highest displacement/voltage sensitivity and corresponding resonance frequency are achieved by the micro-actuator. This micro-actuator is also simulated by finite element method. The results reveal that the piezoelectric element with multi-layer structure is particularly effective in increasing the driving capacity of the piezoelectric micro-actuator.