共 50 条
- [1] CHARACTERISTICS OF POLYIMIDE FILMS DEPOSITED BY IONIZED CLUSTER BEAM JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 12 (06): : 3180 - 3185
- [2] Investigation of polyimide thin films deposited by ionized cluster beam JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (3B): : 1715 - 1721
- [5] SIO2-FILMS DEPOSITED ON SI BY AN IONIZED CLUSTER BEAM JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 1148 - 1151
- [6] SURFACE AND INTERFACE CHARACTERISTICS OF CU FILMS DEPOSITED BY IONIZED CLUSTER BEAM JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (02): : 840 - 845
- [8] Diffusion of copper into polyimide deposited by ionized cluster beam JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (02): : 380 - 384
- [9] CHARACTERISTICS OF POLYIMIDE FILM DEPOSITED BY IONIZED CLUSTER BEAM NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 94 (1-2): : 66 - 72