High pressure aluminium for sub-micron vias using a liquid transducer

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作者：
Jongste, J.F. [1 ]
Li, X. [1 ]
Lokker, J.P. [1 ]
Janssen, G.C.A.M. [1 ]
Radelaar, S. [1 ]
机构：
[1] DIMES, Nano Physics and Technology, Delft University of Technology, P.O. Box 5046, 2600 GA Delft, Netherlands
来源：
Vide: Science, Technique et Applications | 1997年 / 53卷 / 283 SUPPL.期
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