High-speed ellipsometer and its application to the process line

被引：0

作者：

Komine, Isamu ^{[1
]}

Miyazaki, Takao ^{[1
]}

Yamada, Yoshiro ^{[1
]}

Kawabata, Shigeo ^{[1
]}

Kuwayama, Michio ^{[1
]}

机构：

[1] System & Control Research Cent

来源：

NKK Technical Review | 1988年 / 53期

关键词：

Films--Thickness Measurement - Galvanized Metal--Manufacture - Optical Variables Measurement--Computer Applications - Thickness Measurement--Instruments;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

A new high speed photometric ellipsometer consisting of simple optical elements, electronics, and personal computer is developed. This ellipsometer, extremely fast and having no moving parts, is suitable for measuring film thickness moving fast in the process line, where no conventional ellipsometer can be applied. This new ellipsometer is applied to measure oil film thickness of order 0 approximately 100 angstrom coated on tinned steel sheet moving at a speed of 5 m/s. In this case, two lasers with different wavelength are used as light sources to elliminate influence of roughness of substrate's surfaces. Oil film thickness measured by the new ellipsometer and those by conventional off-line method (hydrophil balance method) agree within the uncertainty of 1 mg/m2 (corresponding thickness is about 11 angstrom).

引用

页码：36 / 43

共 50 条

[31] SIGNALING FOR VERY HIGH-SPEED LINE
WEBER, O
FRENCH RAILWAY TECHNIQUES, 1978, (01): : 45 - 57
[32] High-speed line on fast track
Hibbert, L
PROFESSIONAL ENGINEERING, 2004, 17 (02) : 33 - 33
[33] A high-speed algorithm for line detection
Ho, CT
Chen, LH
PATTERN RECOGNITION LETTERS, 1996, 17 (05) : 467 - 473
[34] HIGH-SPEED LINE FOR BIG BOTTLES
不详
FOOD ENGINEERING, 1982, 54 (08): : 64 - 65
[35] On-line measurement of orientation development in the high-speed melt spinning process
Kikutani, T
Nakao, K
Takarada, W
Ito, H
POLYMER ENGINEERING AND SCIENCE, 1999, 39 (12): : 2349 - 2357
[36] HIGH-SPEED CDS0.2SE0.8 PHOTOCONDUCTOR AND ITS APPLICATION TO LINE-IMAGE SENSORS
YUKAMI, N
IKEDA, M
HARADA, Y
NISHITANI, M
NISHIKURA, T
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1986, 33 (04) : 520 - 525
[37] Research on High-speed Railway Line Selection Based on Analytic Hierarchy Process
Zhang, Feng
Wang, Xindi
Sheng, Fushen
APPLIED DECISIONS IN AREA OF MECHANICAL ENGINEERING AND INDUSTRIAL MANUFACTURING, 2014, 577 : 1061 - +
[38] A novel twisted differential line on PCB: Crosstalk model and its application to high-speed interconnect circuit design
Kam, DG
Kim, JG
ELECTRICAL PERFORMANCE OF ELECTRONIC PACKAGING, 2002, : 153 - 156
[39] A HIGH SPEED PRECISION AUTOMATIC ELLIPSOMETER
CAHAN, BD
SPANIER, RF
SURFACE SCIENCE, 1969, 16 : 166 - &
[40] Doppler effect in high-speed rail seismic wavefield and its application
Yiran Jiang
Jieyuan Ning
Jingchong Wen
Yongxiang Shi
Science China Earth Sciences, 2022, 65 : 414 - 425

← 1 2 3 4 5 →