High-speed ellipsometer and its application to the process line

被引：0

作者：

Komine, Isamu ^{[1
]}

Miyazaki, Takao ^{[1
]}

Yamada, Yoshiro ^{[1
]}

Kawabata, Shigeo ^{[1
]}

Kuwayama, Michio ^{[1
]}

机构：

[1] System & Control Research Cent

来源：

NKK Technical Review | 1988年 / 53期

关键词：

Films--Thickness Measurement - Galvanized Metal--Manufacture - Optical Variables Measurement--Computer Applications - Thickness Measurement--Instruments;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

A new high speed photometric ellipsometer consisting of simple optical elements, electronics, and personal computer is developed. This ellipsometer, extremely fast and having no moving parts, is suitable for measuring film thickness moving fast in the process line, where no conventional ellipsometer can be applied. This new ellipsometer is applied to measure oil film thickness of order 0 approximately 100 angstrom coated on tinned steel sheet moving at a speed of 5 m/s. In this case, two lasers with different wavelength are used as light sources to elliminate influence of roughness of substrate's surfaces. Oil film thickness measured by the new ellipsometer and those by conventional off-line method (hydrophil balance method) agree within the uncertainty of 1 mg/m2 (corresponding thickness is about 11 angstrom).

引用

页码：36 / 43

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