共 50 条
- [41] Acoustic wave chemical microsensors in GaAs MICROMACHINED DEVICES AND COMPONENTS IV, 1998, 3514 : 103 - 110
- [44] An integrated circuit design for piezoelectric acoustic microsensors PROCEEDINGS OF THE 2004 CHINA-JAPAN JOINT MEETING ON MICROWAVES, 2004, : 643 - 648
- [46] Scaling of thermal CMOS gas flow microsensors: Experiment and simulation NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS, 1996, : 116 - 121
- [47] Design and fabrication of microsensors using standard CMOS IC process Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao, 1997, 18 (03): : 283 - 291
- [48] CHEMICAL MICROSENSORS - A NEW GENERATION OF ELECTRONIC DEVICES PHYSICS IN TECHNOLOGY, 1988, 19 (01): : 26 - 29
- [49] SILICON-BASED CHEMICAL MICROSENSORS AND MICROSYSTEMS INTERFACIAL DESIGN AND CHEMICAL SENSING, 1994, 561 : 244 - 254