共 50 条
- [32] Defect density of a-Si:H films grown at high deposition rates J Non Cryst Solids, pt 1 (371-374):
- [34] OPTOELECTRONIC PROPERTIES AND PLASMA DIAGNOSTICS OF HIGH DEPOSITION RATE a-Si:H FILMS USING DISILANE. Solar Cells, 1987, 24 (1-2): : 57 - 65
- [35] The optimization of the deposition variables for high photoconductivity a-Si:H films prepared by electron cyclotron resonance plasma chemical vapor deposition JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (12B): : 6959 - 6964
- [36] In situ ellipsometric studies of the growth of a-Si:H films prepared by the hot wire deposition AMORPHOUS SILICON TECHNOLOGY - 1996, 1996, 420 : 425 - 430
- [38] a-Si:H/c-Si heterostructures prepared by 55 kHz glow discharge high-rate deposition technique J Non Cryst Solids, Pt 2 (1123-1126):
- [40] BORON DOPED A-SI - H-FILMS PREPARED BY ECR PLASMA ENHANCED CVD DENKI KAGAKU, 1988, 56 (07): : 516 - 520