Preparation of PZT film on (100)Pt/(100) MgO substrate by CVD and its properties

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Otsu, Masato [1 ]
Funakubo, Hiroshi [1 ]
Shinozaki, Kazuo [1 ]
Henmi, Hiroshi [1 ]
Mizutani, Nobuyasu [1 ]
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[1] Tokyo Inst of Technology, Tokyo, Japan
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页码:127 / 131
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