Preparation of PZT film on (100)Pt/(100) MgO substrate by CVD and its properties

被引：0
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作者：
Otsu, Masato [1 ]
Funakubo, Hiroshi [1 ]
Shinozaki, Kazuo [1 ]
Henmi, Hiroshi [1 ]
Mizutani, Nobuyasu [1 ]
机构：
[1] Tokyo Inst of Technology, Tokyo, Japan
来源：
Journal of the Ceramic Society of Japan. International ed. | 1994年 / 102卷 / 02期
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页码：127 / 131
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