Influences of various metal elements on field aided lateral crystallization of amorphous silicon films

被引：0
|
作者：
Lee, Jae-Bok [1 ]
Lee, Chan-Jae [2 ]
Choi, Duck-Kyun [1 ]
机构：
[1] Department of Ceramic Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-ku, Seoul 133-791, Korea, Republic of
[2] Electronics Devices Research Center, Korea Electronics Technology Institue, San No. 455-6, Masan-Ri, Jinwi-Myon, Pyuntaek-Si, Kyungki-Do 451-860, Korea, Republic of
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2001年 / 40卷 / 11期
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页码：6177 / 6181
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