SCANNING ELECTRON MICROSCOPY STUDIES OF SILICON ON INSULATOR DEVICES.

被引：0
|
作者：
Drake, Donald J. [1 ]
Fernquist, Richard [1 ]
Hawkins, William G. [1 ]
机构：
[1] Xerox Corp, Webster Research Cent,, Webster, NY, USA, Xerox Corp, Webster Research Cent, Webster, NY, USA
来源：
Scanning Electron Microscopy | 1984年 / pt 4期
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摘要：
5
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页码：1579 / 1584
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