Challenges in hardening technologies using shallow-trench isolation

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Sandia Natl Lab, Albuquerque, United States [1 ]
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IEEE Trans Nucl Sci | / 6 pt 1卷 / 2584-2592期
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The authors thank P. S. Winokur; J; R; Schwank; C; Applett; S; Custer; D; L; Hetherington; M; Fleetwood; and R. Jarecki for stimulating discussions; and R. A. Loemker; Riewe; and L. P. Slchanwald for experimental support. We also thank the staff of Sandia’s Microelectronics Development Laboratory for providing process support for this work. Sandia is a niultiprogram laboratory operated by Sandia Corporation; a Lockheed Martin Company; for the United States Department of Energy under Contract DE-ACO4-94AL85O00;
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