Electrical, optical, and structural properties of indium-tin-oxide thin films deposited on polyethylene terephthalate substrates by rf sputtering

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Department of Electrical Engineering, Michigan Technological University, Houghton, MI 49931, United States [1 ]
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J. Vac. Sci. Technol. A Vac. Surf. Films | / 3卷 / 1636-1640期
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