共 50 条
- [31] Ceramic via wafer-level packaging for MEMS ADVANCES IN ELECTRONIC PACKAGING 2005, PTS A-C, 2005, : 1069 - 1074
- [32] Vacuum wafer-level packaging for MEMS applications MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY VIII, 2003, 4979 : 271 - 278
- [33] Trends in Wafer-level Packaging of MEMS: MEMS Packaging Solutions Advanced Packaging, 2004, 13 (04): : 25 - 27
- [34] Wafer-level packaging of MEMS accelerometers with through-wafer interconnects 55TH ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE, VOLS 1 AND 2, 2005 PROCEEDINGS, 2005, : 320 - 323
- [35] Embedded Wafer-level Microfluidic Cooling Designs for The System on Wafer Packaging 2023 24TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY, ICEPT, 2023,
- [36] A low cost wafer-level MEMS packaging technology MEMS 2005 MIAMI: TECHNICAL DIGEST, 2005, : 634 - 637
- [37] Electrical test strategies for a wafer-level packaging technology IEEE TRANSACTIONS ON ELECTRONICS PACKAGING MANUFACTURING, 2003, 26 (04): : 267 - 272
- [39] Wafer-Level Packaging Technology for Optical Sensor Devices 2017 IEEE 19TH ELECTRONICS PACKAGING TECHNOLOGY CONFERENCE (EPTC), 2017,
- [40] Metal-Assisted Hermetic Wafer-Level Packaging 2014 4TH IEEE INTERNATIONAL WORKSHOP ON LOW TEMPERATURE BONDING FOR 3D INTEGRATION (LTB-3D), 2014, : 60 - 60