Properties of reactively RF magnetron-sputtered chromium nitride coatings

被引：0
|
作者：
Bertrand, Ghislaine [1 ]
Savall, Catherine [1 ]
Meunier, Cathy [1 ]
机构：
[1] Lab de Metrologie des Interfaces, Techniques, Montbeliard, France
来源：
Surface and Coatings Technology | 1997年 / 96卷 / 2-3期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：323 / 329
相关论文
共 50 条
  • [1] Properties of reactively RF magnetron-sputtered chromium nitride coatings
    Bertrand, G
    Savall, C
    Meunier, C
    SURFACE & COATINGS TECHNOLOGY, 1997, 96 (2-3): : 323 - 329
  • [2] Characterization of magnetron-sputtered chromium and iron nitride films
    Kacsich, T.
    Niederdrenk, M.
    Schaaf, P.
    Lieb, K.P.
    Geyer, U.
    Schulte, O.
    Surface and Coatings Technology, 1997, 93 (01): : 32 - 36
  • [3] Characterization of magnetron-sputtered chromium and iron nitride films
    Kacsich, T
    Niederdrenk, M
    Schaaf, P
    Lieb, KP
    Geyer, U
    Schulte, O
    SURFACE & COATINGS TECHNOLOGY, 1997, 93 (01): : 32 - 36
  • [4] Tribological properties of magnetron-sputtered TiC coatings
    Feng, L
    Tang, J
    Zabinski, JS
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1998, 257 (02): : 240 - 249
  • [5] CHARACTERIZATION OF RF MAGNETRON-SPUTTERED CrCuN AND CrNiN COATINGS BY NANOINDENTATION
    Tan, Shuyong
    Liu, Xiaohui
    Zhang, Xuhai
    Fang, Feng
    Wang, Zhangzhong
    SURFACE REVIEW AND LETTERS, 2017, 24 (07)
  • [6] GROWTH OF MAGNETRON-SPUTTERED COATINGS
    SEDLACEK, V
    KOVOVE MATERIALY-METALLIC MATERIALS, 1995, 33 (01): : 22 - 30
  • [7] PROPERTIES OF MAGNETRON-SPUTTERED SILICON-NITRIDE FILMS
    SERIKAWA, T
    OKAMOTO, A
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (12) : 2928 - 2933
  • [8] X-ray diffractometry analysis of rf-magnetron-sputtered chromium chromium nitride coatings
    Meunier, C
    Vives, S
    Bertrand, G
    SURFACE & COATINGS TECHNOLOGY, 1998, 107 (2-3): : 149 - 158
  • [9] LOW-TEMPERATURE GROWTH OF RF REACTIVELY PLANAR MAGNETRON-SPUTTERED ALN FILMS
    PENZA, M
    DERICCARDIS, MF
    MIRENGHI, L
    TAGLIENTE, MA
    VERONA, E
    THIN SOLID FILMS, 1995, 259 (02) : 154 - 162
  • [10] Surface passivation of silicon by rf magnetron-sputtered silicon nitride films
    Vetter, M
    THIN SOLID FILMS, 1999, 337 (1-2) : 118 - 122
12345